Beilstein J. Nanotechnol.2024,15, 242–255, doi:10.3762/bjnano.15.23
-induced deposition of platinum. Finally, we present measurements that characterize the spread of mechanical resonant frequency, the temperature dependence of the microwave resonance, and the sensor’s operation as an electromechanical transducer of force.
Keywords: atomic force microscopy; forcesensing
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Figure 1:
(a) Scanning electron microscope (SEM) image of a fabricated sensor seen from an angled topside vie...